刘瑞，许文杰，袁妍妍*（江苏科技大学材料科学与工程国家级实验教学示范中心，江苏 镇江 212003）
文章编号：1004 – 227X (2019) 05 – 0194 – 06
Simulation and improvement for thickness uniformity of electroplated nickel coating on metal components ofmicro-electro-mechanical system// LIU Rui, XU Wen-jie, YUAN Yan-yan*
Abstract: In respect of the thickness nonuniformity of nickel coatings frequently occurred in electroplating on metal components of micro-electro-mechanical system (MEMS), the distribution of electric field during electroplating process was modeled and analyzed using ANSYS, a finite element analysis software. The effects of the size of in-chip auxiliary cathode and its spacing with respect to microelement on the uniformity of nickel coating were discussed. The parameters related to the out-chip axillary cathode including the size of through hole on baffle, the spacing between baffle and substrate, as well as the wall width of copper ring and its spacing with respect to substrate were optimized by orthogonal test, and suitable conditions for electroplating were obtained.
Keywords: micro-electro-mechanical system; component with metal substrate; electroplating; thickness uniformity;modeling; auxiliary cathode
First-author’s address: National Demonstration Center for Experimental Materials Science and Engineering Education,Jiangsu University of Science and Technology, Zhenjiang 212003, China