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190506-调制比对磁控溅射Ti/TiN 多层膜组织结构和结合力的影响

   作者:镀涂学堂小编    单位:电镀与涂饰    日期:2019-03-26     浏览:524    评论:0    
提示:中文核心期刊,中国科技核心期刊! DOI: 10.19289/j.1004-227x.2019.05.006调制比对磁控溅射Ti/TiN 多层膜组织结构和结合力的影

中文核心期刊,中国科技核心期刊!



DOI: 10.19289/j.1004-227x.2019.05.006

调制比对磁控溅射Ti/TiN 多层膜组织结构和结合力的影响

刘闯,周晖*,张凯锋,郑军,冯兴国,郑玉刚(兰州空间技术物理研究所,真空技术与物理国防科技重点实验室,甘肃 兰州 730000)

摘要:通过固定薄膜厚度与调制周期,改变Ti 与TiN 调制比(分别为1∶3、1∶5、1∶9 和1∶11),采用反应磁控溅射法在硅片上制备Ti/TiN 多层膜,研究调制比对薄膜微观组织结构及薄膜与基体结合力的影响。用X 射线衍射仪(XRD)分析薄膜的晶体结构,用扫描电镜(SEM)观察薄膜的形貌,用纳米压痕仪测试薄膜的硬度,用纳米划痕仪测试薄膜与基体之间的结合力。结果表明:多层膜中TiN 出现(220)晶面择优取向,Ti/TiN 薄膜为柱状晶方式生长。柱状晶的细化程度随调制比的变化而发生周期性变化,柱状晶组织细化程度高的样品具有更高的硬度,但结合力更低。

关键词:钛;氮化物;多层膜;反应磁控溅射;调制比;结合力

中图分类号:TG174.444 

文献标志码:A 

文章编号:1004 – 227X (2019) 05 – 0212 – 06

Effect of modulation ratio on structure and adhesion strength of magnetron sputtered Ti/TiN multilayer film// LIU Chuang, ZHOU Hui*, ZHANG Kai-feng, ZHENG Jun, FENG Xing-guo, ZHENG Yu-gang

Abstract: Some alternating Ti/TiN multilayer films were deposited on Si substrates by reactive magnetron sputtering with constant modulation period and film thickness but varying modulation ratio (1:3, 1:5, 1:9, and 1:11) to explore the effect of modulation ratio on microstructure of film and its adhesion strength to the substrate. The crystal structure, micromorphology,hardness, and adhesion strength of the multilayer films were examined using X-ray diffractometer (XRD), scanning electron microscope (SEM), nanoindentation tester, and nanoscratch tester, respectively. The results showed that the TiN phase exhibited a preferred orientation at (220) plane. The multilayer film had a columnar microstructure, and its fineness was changed periodically with modulation ratio. The films with finer columnar microstructure had higher hardness but lower adhesion strength.

Keywords: titanium; nitride; multilayer film; reactive magnetron sputtering; modulation ratio; adhesion strength

First-author’s address: Lanzhou Institute of Physics, CAST; Key Laboratory of Vacuum Technology and Physics National Defense Technology, Lanzhou 730000, China

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